Foundation of MEMS (絕)
- 20本以上，享 8.5折
售價
$
洽詢
- 一般書籍
- ISBN：9780131992047
- 作者：Chang Liu
- 版次：1
- 年份：2006
- 出版商：Pearson Education
- 頁數/規格：530頁/平裝單色
目錄
Table of Contents
1. Introduction
2. Introduction to Microfabrication
3. Review of Essential Electrical and Mechanical Concepts
4. Electrostatic Sensing and Actuation
5. Thermal Sensing and Actuation
6. Piezoresistive Sensors
7. Piezoelectric Sensing and Actuation
8. Magnetic Actuation
9. Summary of Sensing and Actuation
10. Bulk Micromachining and Sillicon Anisotropic Etching
11. Surface Micromachining
12. Polymer MEMS
13. Microfluidics Applications
14. Instruments for Scanning Probe Microscopy
15. Optical MEMS
16. MEMS Technology Management
1. Introduction
2. Introduction to Microfabrication
3. Review of Essential Electrical and Mechanical Concepts
4. Electrostatic Sensing and Actuation
5. Thermal Sensing and Actuation
6. Piezoresistive Sensors
7. Piezoelectric Sensing and Actuation
8. Magnetic Actuation
9. Summary of Sensing and Actuation
10. Bulk Micromachining and Sillicon Anisotropic Etching
11. Surface Micromachining
12. Polymer MEMS
13. Microfluidics Applications
14. Instruments for Scanning Probe Microscopy
15. Optical MEMS
16. MEMS Technology Management
